JOURNAL ARTICLE

Enhancement of secondary ion yield on gas cluster ion beam-secondary ion mass spectrometry with nonaromatic matrices: Dependence on matrix species and molecular weight.

  • Published In: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics, 2025, v. 43, n. 2. P. 1 1 of 3

  • Database: Applied Science & Technology Source Ultimate 2 of 3

  • Authored By: Yoshizawa, Hayate; Fujii, Makiko; Seki, Toshio; Matsuo, Jiro 3 of 3

Abstract

This article focuses on the evaluation of non-aromatic matrices, specifically citric acid and juniperic acid, for enhancing secondary ion yields in argon gas cluster ion beam matrix-enhanced secondary ion mass spectrometry (Ar-GCIB ME-SIMS). Using polyethylene glycol (PEG) polymers of varying molecular weights as analytes, the study found that citric acid preferentially enhances ion yields for higher molecular weight PEG, while juniperic acid is more effective for lower molecular weight PEG. The enhancement is attributed primarily to increased ionization probability, with citric acid also suppressing molecular fragmentation more effectively than juniperic acid. These findings suggest that matrix species and molecular weight influence the sensitivity of ME-SIMS, highlighting the potential of non-aromatic compounds as matrices in this technique.

Additional Information

  • Source:Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics. 2025/03, Vol. 43, Issue 2, p1
  • Document Type:Article
  • Subject Area:Chemistry
  • Publication Date:2025
  • ISSN:21662746
  • DOI:10.1116/6.0004062
  • Accession Number:183942826
  • Copyright Statement:Copyright of Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics is the property of American Institute of Physics and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)

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