JOURNAL ARTICLE

Novel technique to control the focal spot size using carbon nanotube based cold cathode electron beam (C-beam) architecture.

  • Published In: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics, 2023, v. 41, n. 2. P. 1 1 of 3

  • Database: Applied Science & Technology Source Ultimate 2 of 3

  • Authored By: Bhotkar, Ketan; Yu, Yi Yin; Sawant, Jaydip; Patil, Ravindra; Park, Kyu Chang 3 of 3

Abstract

This article focuses on the development and optimization of a cold cathode electron beam (C-beam) based on vertically aligned carbon nanotubes (VACNTs) for enhanced field emission (FE) performance. Five different multi-array emitter island designs, including a 240 × 240 μm² single island and four smaller subislands (65 × 65, 75 × 75, 90 × 90, and 100 × 100 μm²), were fabricated and tested to study the screening effect on FE properties. Experimental and simulation results showed that dividing the large island into subislands reduced the screening effect, with the 75 × 75 μm² subisland achieving the best triode emission current (0.75 mA) and the smallest focal spot size (FSS) in x-ray imaging (0.45 mm vertical, 0.49 mm horizontal). These findings suggest that subisland design optimization can significantly improve VACNT-based electron sources for applications such as x-ray imaging.

Additional Information

  • Source:Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics. 2023/03, Vol. 41, Issue 2, p1
  • Document Type:Article
  • Subject Area:Chemistry
  • Publication Date:2023
  • ISSN:21662746
  • DOI:10.1116/6.0002285
  • Accession Number:162676200
  • Copyright Statement:Copyright of Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics is the property of American Institute of Physics and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)

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