Application of x-ray energy dispersive spectroscopy to analyzing the thickness of diamond-like carbon film deposited on the surface of microparticles.

This article focuses on a novel method for quantitatively measuring the thickness of diamond-like carbon (DLC) films deposited on microparticles using energy dispersive spectroscopy (EDS). The technique establishes a direct linear relationship between the critical electron penetration energy (TC) and the DLC film thickness by analyzing the elemental composition detected via EDS, enabling thickness estimation on particle surfaces based on calibration from bulk samples. Experimental validation using DLC films deposited on alumina substrates and particles demonstrates that this approach yields thickness measurements with acceptable accuracy, particularly for films several hundred nanometers thick. The method is adaptable to various film and substrate materials, provided their elemental compositions differ and appropriate adjustments to electron beam parameters are made.