Piezoelectric-based large-angle stroke fast steering mirror with high ratio of output range to resolution and self-sensing capability.

This article focuses on the design, modeling, and experimental validation of a dual-axis piezoelectric-actuated fast steering mirror (FSM) intended for high-precision, large-angle beam steering in space optical applications. The proposed FSM employs cascading two-stage amplification mechanisms and deflection adjustment mechanisms to achieve a sub-radian tilt range exceeding 148 mrad with a high ratio of output range to resolution (greater than 3.9 × 10⁴) and integrated self-sensing via strain gauges for real-time feedback. Analytical models, finite element analysis, and dynamic system identification support the design, while experiments demonstrate closed-loop control with micro-radian resolution and relative tracking errors below 0.02% for complex one- and two-degree-of-freedom trajectories. Compared to existing electromagnetic and piezoelectric FSMs, this design offers superior stroke and precision, making it suitable for advanced space laser communication and optical tracking systems.