JOURNAL ARTICLE

Microwave-induced thermoacoustic imaging with a multi-cell AlScN piezoelectric micromachined ultrasonic transducer.

  • Published In: Applied Physics Letters, 2023, v. 122, n. 13. P. 1 1 of 3

  • Database: Academic Search Ultimate 2 of 3

  • Authored By: Wang, Yiwei; Zhang, Lejia; Wang, Baosheng; Cai, Junxiang; Gu, Yuandong Alex; Lou, Liang; Wang, Xiong; Wu, Tao 3 of 3

Abstract

This article focuses on the development and evaluation of a multi-cell aluminum scandium nitride (AlScN) piezoelectric micromachined ultrasonic transducer (PMUT) for microwave-induced thermoacoustic imaging (MITAI), a noninvasive diagnostic technique that detects acoustic waves generated by microwave pulses in biological samples. The AlScN PMUT demonstrated a nearly threefold wider detection angle and improved imaging accuracy, reducing mean squared error by up to 72% compared to a traditional ultrasonic transducer, thereby enabling more complete reconstruction of sample features. The miniaturized, low-voltage PMUT device shows promise for clinical and personal diagnostic applications, with potential for further enhancement through increased bandwidth and electromechanical coupling.

Additional Information

  • Source:Applied Physics Letters. 2023/03, Vol. 122, Issue 13, p1
  • Document Type:Article
  • Subject Area:Engineering
  • Publication Date:2023
  • ISSN:0003-6951
  • DOI:10.1063/5.0140069
  • Accession Number:162857435
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