Toward High‐Throughput Single‐Spin Optically Detected Magnetic Resonance Spectroscopy with Spatially Programmable Laser Illumination.

The single nitrogen‐vacancy (NV) centers in diamond are shown as a quantum sensor with broad applications in nanoscale sensing of magnetic field, electric field, temperature, and strain. However, the basic technique, namely, optically detected magnetic resonance to manipulate and measure single NV centers needs to be highly sped up for broad and practical applications. Here, this work shows a parallel optically detected magnetic resonance (ODMR) platform of single NV centers including the programmable excitation laser spots generated by a digital micromirror device, a four‐channel uniform microwave delivery, and the fluorescence detector based on scientific complementary metal–oxide–semiconductor camera. In the viewing field of 26 µm, hundreds of distinguishable fluorescent spots are addressed and 413 NV center spots are recognized. The magnetic resonance spectrum, Rabi oscillation, and spin echo of each NV center spot are measured in parallel. As a result, a preliminary speedup of ≈20‐fold is achieved compared to the confocal‐based ODMR and can be further extended to thousands of folds after updating the digital micromirror device and camera. [ABSTRACT FROM AUTHOR]