JOURNAL ARTICLE

Microstructure, creep properties, and electrical resistivity of magnetron sputtering deposited SAC305 thin films.

  • Published In: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics, 2023, v. 41, n. 5. P. 1 1 of 3

  • Database: Applied Science & Technology Source Ultimate 2 of 3

  • Authored By: Ojha, Manish; Mohammed, Yousuf; Stone, D. S.; Elmustafa, A. A. 3 of 3

Abstract

This article investigates the surface morphology, mechanical properties, and electrical resistivity of 96.5Sn–3.0Ag–0.5Cu (SAC305) thin films deposited on silicon (Si) and silicon dioxide (SiO₂) substrates via RF magnetron sputtering. Optimal film quality, characterized by a polycrystalline β-Sn structure with an average grain size of ~1 μm and thickness of ~2.2 μm, was achieved at 2.4 mTorr pressure and 200 W RF power, with polishing improving surface roughness significantly. Electrical resistivity measurements showed the thin films have higher resistivity (19.6 μΩ·cm) than bulk SAC305 (13.7 μΩ·cm), attributed to microstructural and interface effects. Nanoindentation creep experiments revealed that the strain rate sensitivity of hardness for both bulk and thin films is approximately 0.10 ± 0.02, consistent with conventional testing data, indicating similar time-dependent deformation behavior in both forms.

Additional Information

  • Source:Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics. 2023/09, Vol. 41, Issue 5, p1
  • Document Type:Article
  • Subject Area:Physics
  • Publication Date:2023
  • ISSN:21662746
  • DOI:10.1116/6.0002949
  • Accession Number:172304308
  • Copyright Statement:Copyright of Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics is the property of American Institute of Physics and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)

Looking to go deeper into this topic? Look for more articles on EBSCOhost.