JOURNAL ARTICLE

Stannane in extreme ultraviolet lithography and vacuum technology: Synthesis and characterization.

  • Published In: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films, 2023, v. 41, n. 6. P. 1 1 of 3

  • Database: Applied Science & Technology Source Ultimate 2 of 3

  • Authored By: Garza, Raquel; Bartlett, Nathan; Crouse, Jameson; Herschberg, Andrew; Mohan Sankaran, R.; Amzad Hossain, Md.; Ruzic, David N. 3 of 3

Abstract

This article focuses on the synthesis, characterization, and analysis of stannane (SnH₄), an unstable gas formed as a by-product during tin removal in extreme ultraviolet (EUV) lithography processes. The study presents the first gravimetric measurement of liquid SnH₄ density, detailed electron ionization mass spectrometry revealing fragmentation patterns of SnH₄ ions, and density functional theory calculations explaining the absence of the SnH₄⁺ ion due to its instability. Surface analysis of Sn films produced by SnH₄ decomposition showed the presence of metallic tin and tin (II) oxide, with further chemical and morphological characterization performed via X-ray photoelectron spectroscopy and electron microscopy. These findings aim to improve understanding of SnH₄’s physicochemical properties to better manage its formation and decomposition in EUV lithography systems.

Additional Information

  • Source:Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films. 2023/12, Vol. 41, Issue 6, p1
  • Document Type:Article
  • Subject Area:Physics
  • Publication Date:2023
  • ISSN:07342101
  • DOI:10.1116/6.0002980
  • Accession Number:173977165
  • Copyright Statement:Copyright of Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films is the property of American Institute of Physics and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)

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