JOURNAL ARTICLE

On-machine separation and compensation of target mirror's surface shape errors in multidimensional interferometric measurement system.

  • Published In: Review of Scientific Instruments, 2025, v. 96, n. 1. P. 1 1 of 3

  • Database: Academic Search Ultimate 2 of 3

  • Authored By: Zhang, Zuyang; Huang, Qiangxian; Lu, Jun; Li, Hongli; Cheng, Rongjun; Zhang, Liansheng 3 of 3

Abstract

This article focuses on a method for on-machine separation and compensation of surface shape errors in three-dimensional (3D) target mirrors used in multi-dimensional interference measurement systems, based on a self-developed micro–nano-coordinate measuring machine (MNCMM). The MNCMM employs a home-made resonant probe and a reference flat crystal to perform grid measurements that enable indirect separation of the target mirror's surface shape errors after installation, addressing deformation caused by gravity and clamping stress. Using an interpolation algorithm for error compensation, the method significantly improved measurement accuracy, demonstrated by reducing the flatness error of a standard flat crystal from 175 nm to 77 nm. An uncertainty analysis identified probe repeatability and reference flatness as main error sources, with a combined measurement uncertainty of 18.9 nm. This approach offers a reliable solution for on-machine compensation of target mirror surface shape errors in high-precision multidimensional interferometric measurements.

Additional Information

  • Source:Review of Scientific Instruments. 2025/01, Vol. 96, Issue 1, p1
  • Document Type:Article
  • Subject Area:Science
  • Publication Date:2025
  • ISSN:0034-6748
  • DOI:10.1063/5.0232489
  • Accession Number:182617881
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