JOURNAL ARTICLE

MgF2-based conformal antireflection coatings on highly curved lenses by atomic layer deposition.

  • Published In: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films, 2025, v. 43, n. 3. P. 1 1 of 3

  • Database: Applied Science & Technology Source Ultimate 2 of 3

  • Authored By: Sugai, Yuma; Sugata, Hironori; Sugawara, Takuya; Muhammad, Safdar; Kaur, Parmish; Hämäläinen, Jani; Lamminmäki, Nina; Kostamo, Juhana 3 of 3

Abstract

This article focuses on the development and evaluation of conformal antireflection (AR) coatings deposited by atomic layer deposition (ALD) on highly curved optical lenses. The study optimized multilayer AR films composed of magnesium fluoride (MgF₂), silicon dioxide (SiO₂), aluminum oxide (Al₂O₃), and hafnium oxide (HfO₂), with MgF₂ selected as the top layer for its low refractive index and broad spectral transparency. A seven-layer AR coating was designed and deposited onto curved B270 glass lenses, achieving reflectance below 1% across the visible spectrum (400–700 nm) uniformly from the center to the edges. The research demonstrates that ALD enables precise, uniform coatings on complex geometries, offering a viable alternative to traditional physical vapor deposition methods, with potential applications in medical optics, photonic integrated circuits, and metasurface devices.

Additional Information

  • Source:Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films. 2025/05, Vol. 43, Issue 3, p1
  • Document Type:Article
  • Subject Area:Science
  • Publication Date:2025
  • ISSN:07342101
  • DOI:10.1116/6.0004251
  • Accession Number:185107594
  • Copyright Statement:Copyright of Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films is the property of American Institute of Physics and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)

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